• Electron Gun: Cold Field Emission (FE) gun.

• Resolution:

  • High Vacuum: 1.5 nm at 15 kV.

  • Low Voltage: 5.0 nm at 1.0 kV.

• Acceleration Voltage: 0.5 kV to 30 kV (0.1 kV steps).

• Magnification: 20x to 500,000x.

• Specimen Chamber Vacuum:

  • High Vacuum Mode: < 10^-3Pa.

• Specimen Stage:

  • Type: 5-axis eucentric stage.

  • Traverse: X: 0 - 100 mm, Y: 0 - 50 mm, Z: 5-30 mm.

  • Rotation/Tilt: 360° rotation; -5 to +60° tilt.

• Detector Systems:

  • Standard Secondary Electron (SE) detector.

• Imaging & Analysis:

  • Compatible with Energy Dispersive X-ray Spectroscopy (EDS/EDX).

  • Compatible with Electron Backscatter Diffraction (EBSD).

  • Image processing tools (e.g., Quartz PCI). 

    
    

Key Features

• Automation: Auto-alignment and auto-focus technology.

• Control Interface: PC-based operation - Windows 2000